Current detection device

ABSTRACT

Magnetic detectors and a lower insulating layer covering the magnetic detectors are disposed on a substrate. On the lower insulating layer, a coil layer including a plurality of segments forming a counter detector of a feedback coil is disposed. Height adjustment layers are disposed on both sides of the coil layer. The coil layer and the height adjustment layers are covered with an upper insulating layer, and a shield layer is disposed thereon. Accordingly, the shield layer can be made substantially flat.

CLAIM OF PRIORITY

This application is a Continuation of International Application No.PCT/JP2016/074284 filed on Aug. 19, 2016, which claims benefit ofJapanese Patent Applications No. 2015-202698 filed on Oct. 14, 2015 andNo. 2016-058282 filed on Mar. 23, 2016. The entire contents of eachapplication noted above are hereby incorporated by reference.

BACKGROUND OF THE INVENTION 1. Field of the Invention

The present invention relates to a current detection device of aso-called magnetic balance type including a feedback coil.

2. Description of the Related Art

Japanese Unexamined Patent Application Publication No. 2013-53903describes an invention related to a current detection device of aso-called magnetic balance type.

In this current detection device, a magnetoresistive element and afeedback coil face a conductor through which a current to be measuredpasses. A current magnetic field excited by the current that is to bemeasured and that flows through the conductor is detected by themagnetoresistive element, and control is performed so that a feedbackcurrent corresponding to the magnitude of the detection output isapplied to the feedback coil. A cancelling magnetic field, which isreverse to the current magnetic field, is applied from the feedback coilto the magnetoresistive element. When the current magnetic field and thecancelling magnetic field reach a balanced state, the current flowingthrough the feedback coil is detected, and the detection output of thecurrent is obtained as a measured value of the current.

As illustrated in FIG. 4, in the current detection device described inJapanese Unexamined Patent Application Publication No. 2013-53903, ashield layer is disposed between the conductor through which a currentto be measured flows and the feedback coil. The shield layer weakens thecurrent magnetic field induced by the current to be measured, and theweakened current magnetic field is applied to the magnetoresistiveelement. Accordingly, the range of intensity of the current to bemeasured that can be detected by the magnetoresistive element iswidened, and the dynamic range for measuring the current magnetic fieldcan be expanded.

To manufacture the current detection device described in JapaneseUnexamined Patent Application Publication No. 2013-53903, it isnecessary to laminate, on a substrate, a magnetoresistive element, alower insulating layer that covers the magnetoresistive element, afeedback coil located on the lower insulating layer, and an upperinsulating layer that covers the feedback coil in this order, and toform a shield layer on the upper insulating layer in a plating processso as to cover the feedback coil.

The upper insulating layer that covers the feedback coil may be anorganic insulating layer. However, the organic insulating layer, whichis hygroscopic, may deteriorate the feedback coil and the shield layerthat are in contact with the upper insulating layer. In addition, sincethe organic insulating layer swells by absorbing water, stress isapplied to the magnetoresistive element, the feedback coil, and soforth, and accordingly the bonding strength at the boundary between theupper insulating layer and the shield layer is more likely to decrease.

For this reason, it is preferable to form the upper insulating layer byusing an inorganic material, such as Si-Nx. However, if the insulatinglayer made of an inorganic material is formed by using chemical vapordeposition (CVD) or spattering, relatively large stepped portions areinevitably produced at a surface of the upper insulating layer, from anupper surface of a coil layer constituting the feedback coil to bothouter sides of the coil layer at both side portions of the feedbackcoil, because the coil layer has a relatively large height. The shieldlayer needs to have a width for covering the feedback coil, and thus theshield layer is formed to cover the stepped portions at the surface ofthe upper insulating layer at both side portions of the shield layer.

A process of manufacturing a current detection device includes a heatingprocess, such as a process of firing a resin for a package, after ashield layer has been formed, and also includes another heating processof soldering the current detection device that has been completed to amother substrate. There is a large difference in linear expansioncoefficient between the upper insulating layer made of an inorganicmaterial and the shield layer made of a metallic material by usingplating. Thus, heat stress is likely to affect the boundary between theupper insulating layer and the shield layer during a cooling processafter each heating process.

As described above, if the upper insulating layer is formed by using aninorganic material, stepped portions are likely to be produced in theupper insulating layer at both side portions of the feedback coil, andthe shield layer is superimposed on the stepped portion while beingdeformed. In such a multilayer structure, the heat stress between theupper insulating layer and the shield layer concentrates on the steppedportion of both the layers, and the concentration of stress is likely tocause a crack at the stepped portions of the upper insulating layer.

In addition, if stepped portions are formed at the surface of the upperinsulating layer, step-like deformed portions are formed also on bothsides of the shield layer. The deformed portions formed on both sides ofthe shield layer decreases an anisotropic magnetic field Hk in the widthdirection of the shield layer, that is, in the sensitivity-axisdirection of the magnetoresistive element, and saturated magnetizationin the same direction of the shield layer decreases. As a result, ashield effect decreases and the dynamic range of a current to bemeasured becomes narrow.

SUMMARY OF THE INVENTION

The present invention provides a current detection device capable ofsuppressing the occurrence of a crack in an upper insulating layercaused by heat stress, by adopting a multilayer structure in which thereis no large stepped portions at a bonding portion between an upperinsulating layer that covers a feedback coil and a shield layer disposedon the upper insulating layer.

The present invention also provides a current detection device thatincludes a shield layer which can be easily formed in a flat shape andthat is capable of suppressing a decrease in saturated magnetization ina sensitivity-axis direction of a magnetic detector.

A current detection device according to the present invention includes acurrent path through which a current to be measured flows; a coil layerhaving a planer helical pattern; a magnetic detector facing the coillayer; a shield layer disposed between the current path and the coillayer; a coil energization section configured to control a current to beapplied to the coil layer in accordance with an increase or decrease ina detection output of the magnetic detector; and a current detectorconfigured to detect an amount of current flowing in the coil layer. Thecoil layer, a height adjustment layer, and an upper insulating layer aredisposed on a lower insulating layer that covers the magnetic detector,the coil layer including a plurality of segments arranged in the helicalpattern, the height adjustment layer being made of a nonmagnetic metaland being disposed on both sides of the coil layer including theplurality of segments, and the upper insulating layer being made of aninorganic material and covering the coil layer and the height adjustmentlayer. The shield layer, which is disposed on the upper insulatinglayer, covers both the coil layer including the plurality of segmentsand the height adjustment layer, and both side portions of the shieldlayer are located above the height adjustment layer.

In the current detection device according to the present invention, thecoil layer and the height adjustment layer may preferably have anidentical height.

In the current detection device according to the present invention, thecoil layer and the height adjustment layer may preferably be platedlayers, and the coil layer and the height adjustment layer maypreferably be made of an identical conductive metallic material.

In the current detection device according to the present invention, theheight adjustment layer may preferably have a length in a direction inwhich the current flows in the coil layer, the length being larger thana length in the direction of the shield layer.

In the current detection device according to the present invention, theheight adjustment layer may preferably have a width in a crossingdirection that crosses a direction in which the current flows in thecoil layer, the width being larger than a width in the crossingdirection of each of the plurality of segments included in the coillayer.

In the current detection device according to the present invention, theshield layer may preferably include the side portions extending in alongitudinal direction of the shield layer and located above the heightadjustment layer, and end portions extending in a lateral direction ofthe shield layer and crossing the current flowing in the coil layer, andthe shield layer may preferably have a larger dimension in thelongitudinal direction than in the lateral direction. The end portionsmay preferably have a curve shape protruding in the longitudinaldirection over an entire length in the lateral direction when viewed inplan.

In the current detection device according to the present invention, theend portions may preferably have a substantially semicircular shape whenviewed in plan.

In the current detection device according to the present invention, asensitivity-axis direction of the magnetic detector may preferablycorrespond to the lateral direction.

In the current detection device according to the present invention, acoil layer including a plurality of segments arranged in a helicalpattern and a height adjustment layer disposed on both sides of the coillayer are covered with an upper insulating layer made of an inorganicmaterial, and a shield layer is disposed on the upper insulating layerso as to cover both the coil layer and the height adjustment layer.Thus, stepped portions can be prevented from being formed at the bondingboundary between the upper insulating layer and the shield layer on bothside portions of the coil layer including the plurality of segments.Even if heat stress is produced between the upper insulating layer andthe shield layer, partial concentration of the heat stress can beprevented, and a crack is less likely to be produced in the upperinsulating layer.

The shield layer can be formed into a substantially flat shape. Thus, adecrease in saturated magnetization in the shield layer in asensitive-axis direction of the magnetic detector can be prevented, anda decrease in the dynamic range of a current to be measured can beprevented. Furthermore, since the shield layer can be formed into asubstantially flat shape, the linearity of a detection output can beincreased.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a plan view illustrating a current detection device accordingto an embodiment of the present invention;

FIG. 2 is a plan view illustrating a feedback coil, height adjustmentlayers, and a shield layer included in the current detection deviceillustrated in FIG. 1;

FIG. 3 is a plan view illustrating magnetic detectors included in thecurrent detection device illustrated in FIG. 1 and a wiring structurethereof;

FIG. 4 is a partial perspective view illustrating the feedback coil, theheight adjustment layers, and the shield layer included in the currentdetection device illustrated in FIG. 1;

FIG. 5 is a cross sectional view taken along line V-V of FIG. 4;

FIG. 6 is a cross sectional view, similar to FIG. 5, illustrating acurrent detection device according to a comparative example;

FIG. 7A is a perspective view illustrating the shield layer included inthe current detection device according to the embodiment of the presentinvention;

FIG. 7B is a perspective view illustrating a shield layer included inthe current detection device according to the comparative exampleillustrated in FIG. 6;

FIG. 8 is a circuit diagram of the current detection device;

FIG. 9 is a chart for describing an anisotropic magnetic field Hk of theshield layer;

FIG. 10 is a chart for describing linearity of a full scale (FS) of adetection output;

FIG. 11A is a bar graph of evaluating linearity of a detection output ofthe current detection device according to the embodiment of the presentinvention;

FIG. 11B is a bar graph of evaluating linearity of a detection output ofthe current detection device including the shield layer according to thecomparative example illustrated in FIG. 7B;

FIG. 12A is a plan view illustrating a shield layer according to Example1 included in the current detection device according to the embodimentof the present invention;

FIG. 12B is a plan view illustrating a shield layer according to Example2 included in the current detection device according to the embodimentof the present invention; and

FIG. 13 is a chart for comparing anisotropic magnetic fields in asensitivity-axis direction of the shield layers illustrated in FIGS. 12Aand 12B.

DESCRIPTION OF THE PREFERRED EMBODIMENTS

A current detection device 1 according to an embodiment of the presentinvention is for detecting an amount of current 10 to be measuredflowing through a current path 40 illustrated in FIGS. 1 and 3, andincludes magnetic detectors 11, 12, 13, and 14, a feedback coil 30, anda shield layer 3 disposed between the current path 40 and the feedbackcoil 30.

As illustrated in the cross-sectional view in FIG. 5, the currentdetection device 1 includes a substrate 2. The substrate 2 is a silicon(Si) substrate. The substrate 2 includes a surface 2 a, which is flat.The magnetic detectors 11, 12, 13, and 14 are disposed on the surface 2a.

As illustrated in FIGS. 1 and 3, the magnetic detectors 11, 12, 13, and14 are arranged at constant intervals in an X direction. The currentpath 40 extends in the X direction, through which the current 10 to bemeasured flows in the right direction in the figures. As illustrated inFIG. 5, the current path 40 is above the substrate 2 and is separatedfrom the substrate 2. The current path 40 faces all the magneticdetectors 11, 12, 13, and 14, and a counter detector 30 a of thefeedback coil 30 disposed above the magnetic detectors 11, 12, 13, and14.

FIGS. 1 and 3 illustrate the arrangement structure and wiring structureof the magnetic detectors 11, 12, 13, and 14, and FIG. 8 illustrates thecircuit diagram thereof.

The magnetic detector 11 located at the left end in FIGS. 1 and 3 andthe magnetic detector 13 located at the right end in FIGS. 1 and 3 areconnected to a wiring path 5. At a terminal portion of the wiring path5, a connection land portion 5 a is disposed. The magnetic detectors 11and 12 are connected in series to each other, and the magnetic detectors13 and 14 are connected in series to each other. The magnetic detectors12 and 14, which are located at the center, are connected to respectivewiring paths 6. At terminal portions of the respective wiring paths 6,connection land portions 6 a are disposed.

A wiring path 7 is connected between the magnetic detectors 11 and 12that are connected in series to each other, and a wiring path 8 isconnected between the magnetic detectors 13 and 14 that are connected inseries to each other. A connection land portion 7 a is disposed at aterminal portion of the wiring path 7, and a connection land potion 8 ais disposed at a terminal portion of the wiring path 8.

The wiring paths 5, 6, 7, and 8 are formed of a conductive layer, whichis made of gold, copper, or the like, disposed on the surface 2 a of thesubstrate 2. Also, the connection land portions 5 a, 6 a, 7 a, and 8 aare formed of a conductive layer, which is made of gold or the like.

Each of the magnetic detectors 11, 12, 13, and 14 is made up of aplurality of magnetoresistive elements in a striped shape, having alength in the X direction larger than a width in the Y direction. In themagnetic detectors 11, 12, 13, and 14, the plurality of magnetoresistiveelements in a striped shape are arranged in a so-called meander patternand are connected in series to each other. The end portions of themagnetoresistive elements arranged in the meander pattern are connectedto any one of the wiring paths 5, 6, 7, and 8.

The magnetoresistive elements are formed of a giant magnetoresistiveelement layer (GMR layer) having a giant magnetoresistance effect, theGMR layer including a fixed magnetic layer, a nonmagnetic layer, and afree magnetic layer laminated in order on an insulating base layerdisposed on the surface 2 a of the substrate 2. The surface of the freemagnetic layer is covered with a protective layer. These layers areformed by CVD or spattering, and are then formed into a striped shape byetching. Furthermore, a connecting conductive layer for connecting thestriped-shape magnetoresistive elements in a meander pattern is formed.

The fixed magnetic layer and the free magnetic layer form a stripedshape in which the longitudinal direction corresponds to the Xdirection. The magnetization of the fixed magnetic layer is fixed in theY direction.

In FIG. 3, magnetization fixation directions P of the fixed magneticlayer are indicated by arrows. The magnetization fixation directions Pare sensitive-axis directions of the individual magnetoresistiveelements and are sensitive-axis directions of the magnetic detectors 11,12, 13, and 14. The magnetoresistive elements constituting the magneticdetectors 11 and 14 have the same magnetization fixation direction P,and the sensitive axes thereof correspond to the downward direction inthe figure. The magnetoresistive elements constituting the magneticdetectors 12 and 13 have the same magnetization fixation direction P,and the sensitive axes thereof correspond to the upward direction in thefigure.

In each magnetoresistive element, the magnetization in the free magneticlayer is directed in the X direction by shape anisotropy and a biasmagnetic field. In each magnetic detector, when an external magneticfield in a sensitive-axis direction (P direction) is applied, themagnetization direction that is the X direction in the free magneticlayer is tilted in the Y direction. When an angle between a vector ofmagnetization in the free magnetic layer and the magnetization fixationdirection P decreases, the electric resistance of the magnetoresistiveelement decreases. When the angle between the vector of magnetization inthe free magnetic layer and the magnetization fixation direction Pincreases, the resistance of themagnetoresistive element increases.

As illustrated in the circuit diagram in FIG. 8, a power source Vdd isconnected to the wiring path 5, the wiring paths 6 are set to a groundpotential, and a bridge circuit made up of the magnetic detectors 11,12, 13, and 14 is applied with a constant voltage. A midpoint voltage V1is obtained from the wiring path 8, and a midpoint voltage V2 isobtained from the wiring path 7.

As illustrated in FIG. 5, the magnetic detectors 11, 12, 13, and 14 andthe wiring paths 5, 6, 7, and 8 are covered with a lower insulatinglayer 4. The lower insulating layer 4 is made of silicon nitride (Si-Nx)and is formed by using CVD.

As illustrated in FIG. 5, the feedback coil 30 is disposed on a surface4a of the lower insulating layer 4. The plane pattern of the feedbackcoil 30 is illustrated in FIGS. 1 and 2. The feedback coil 30 is woundclockwise in a helical manner from one land portion 31 toward anotherland portion 32. A portion that is located above the magnetic detectors11, 12, 13, and 14 and that faces the current path 40 serves as thecounter detector 30 a.

FIG. 5 illustrates the cross section of a region where the counterdetector 30 a is disposed. The feedback coil 30 is formed of a coillayer 35 that has a substantially rectangular cross section and that isplanarly wound in a helical pattern. In the counter detector 30 a, aplurality of segments of the wound coil layer 35 are arranged in the Ydirection. In the counter detector 30 a, the plurality of segments ofthe coil layer 35 are arranged at constant intervals in the Y directionand are linearly arranged in parallel in the X direction.

The coil layer 35 is a plated layer and is made of gold, which is alow-resistance nonmagnetic metallic layer. Alternatively, the coil layer35 may be made of another type of metal, such as copper. Each segment ofthe coil layer 35 has a cross-sectional shape having a width W1 of about15 to 40 μm and a height H1, which is equal to or slightly larger thanthe foregoing width W1.

As illustrated in FIGS. 2, 4, and 5, on the surface 4a of the lowerinsulating layer 4, a height adjustment layer 36 is disposed on an outerside in the Y direction of the counter detector 30 a including theplurality of segments of the coil layer 35, and a height adjustmentlayer 37 is disposed on an inner side in the Y direction of the counterdetector 30 a. The height adjustment layers 36 and 37 are plated layersmade of a nonmagnetic metallic material. Preferably, the heightadjustment layers 36 and 37 are made of the same metallic material asthat of the coil layer 35 and are formed in the same plating process asthat for forming the coil layer 35. Alternatively, the height adjustmentlayers 36 and 37 may be made of a metal different from the metal of thecoil layer 35, for example, aluminum, and may be formed in a processdifferent from the process of forming the coil layer 35.

As illustrated in FIG. 5, a height H2 of the height adjustment layers 36and 37 is equal to the height H1 of the coil layer 35. The width W2 inthe Y direction of the height adjustment layers 36 and 37 issufficiently larger than the width W1 in the Y direction of the coillayer 35. An interval δ2 in the Y direction between the heightadjustment layers 36 and 37 and the coil layer 35 adjacent thereto ispreferably equal to or smaller than an interval δ1 between the segmentsadjacent to each other of the coil layer 35 in the counter detector 30a.

As illustrated in FIG. 5, an upper insulating layer 9 is disposed on theplurality of segments of the coil layer 35 and the height adjustmentlayers 36 and 37 located on both sides thereof. The upper insulatinglayer 9 is a silicon nitride (Si-Nx) layer and is formed by using CVD.FIG. 4 illustrates an external appearance in a state where the coillayer 35 constituting the feedback coil 30 and the height adjustmentlayers 36 and 37 are covered with the upper insulating layer 9. As aresult that the upper insulating layer 9 is formed by using CVD, bulges9 a are formed at its surface just above the coil layer 35, and recesses9 b are formed between the segments adjacent to each other of the coillayer 35 and between the height adjustment layers 36 and 37 and the coillayer 35.

FIG. 6 illustrates a comparative example in which the height adjustmentlayers 36 and 37 are not provided. As illustrated in this comparativeexample, if the upper insulating layer 9 is formed by using CVD orspattering, stepped portions 9 c are formed at the surface of the upperinsulating layer 9 on both sides in the Y direction of the region wherethe plurality of segments of the coil layer 35 are arranged. Incontrast, in the embodiment of the present invention, the heightadjustment layers 36 and 37 are provided on both sides of the coil layer35 as illustrated in FIGS. 4 and 5, and accordingly no large steppedportions are formed at the surface of the upper insulating layer 9 onboth sides in the Y direction of the region where the plurality ofsegments of the coil layer 35 are arranged.

As illustrated in FIG. 5, the shield layer 3 is disposed on the surfaceof the upper insulating layer 9. The shield layer 3 is a plated layermade of a magnetic metallic material, such as Ni—Fe alloy (nickel-ironalloy). As illustrated in FIG. 5, the shield layer 3 continuouslyextends in the Y direction so as to cover the plurality of segments ofthe coil layer 35 constituting the feedback coil 30 and the heightadjustment layers 36 and 37 on both sides thereof.

Side portions 3 a of the shield layer 3 along the Y direction arelocated on an outer side in the Y direction of the region where the coillayer 35 is disposed. The side portions 3 a are located just above theheight adjustment layers 36 and 37. As illustrated in FIG. 5, a width Wain the Y direction of a region where the shield layer 3 and the heightadjustment layers 36 and 37 overlap each other is larger than theinterval δ2 between the height adjustment layers 36 and 37 and the coillayer 35.

As a result, as illustrated in FIGS. 4 and 7A, the shield layer 3 issubstantially planar and does not have a large deformed portion over theentire width Ws in the lateral direction (Y direction). As illustratedin FIG. 1, the shield layer 3 covers all the magnetic detectors 11, 12,13, and 14 from the top and also covers the counter detector 30 a of thefeedback coil 30. As illustrated in FIG. 2, the height adjustment layers36 and 37 protrude from the side portions 3 a in the X direction of theshield layer 3 on both sides in the X direction. Thus, also in the Xdirection, the shield layer 3 is planar and does not have a deformedportion resulting from a stepped portion.

The current detection device 1 is subjected to a plurality of heatingprocesses after the shield layer 3 has been formed. For example, theheating processes include a process of curing an organic insulatinglayer, a process of firing resin in a packaging process, and a solderingprocess for mounting the current detection device 1 on a mothersubstrate. Since the linear expansion coefficient differs between theNi—Fe alloy forming the shield layer 3 and Si-Nx as an inorganicmaterial of the upper insulating layer 9, heat stress is produced at theboundary between the shield layer 3 and the upper insulating layer 9during a cooling process after the heating processes.

In the comparative example illustrated in FIG. 6, the height adjustmentlayers 36 and 37 are not provided. Thus, the large stepped portions 9 care formed on the surface of the upper insulating layer 9 on both sidesin the Y direction of the region where the coil layer 35 is disposed,and the shield layer 3 is superimposed on the stepped portions 9 c.Accordingly, heat stress concentrates at the stepped portions 9 c, and acrack is likely to be produced at the stepped portions 9 c of the upperinsulating layer 9.

In contrast, in the embodiment of the present invention illustrated inFIGS. 4 and 5, the height adjustment layers 36 and 37 prevent thestepped portions 9 c from being formed in the upper insulating layer 9and also prevent deformed portions resulting from the stepped portionsfrom being formed in the shield layer 3. Thus, there is no region wherelarge stress concentrates at the boundary between the upper insulatinglayer 9 and the shield layer 3, and a problem, such as breakage of theupper insulating layer 9 caused by heat stress, is less likely to arise.

In the current detection device 1 according to the embodiment of thepresent invention illustrated in FIGS. 4 and 5, the shield layer 3 isplanar as illustrated in FIG. 7A. However, in the comparative exampleillustrated in FIG. 6, the stepped portions 9 c cause deformed portions103 a to be formed at end portions on both sides in the Y direction ofthe shield layer 103, as illustrated in FIG. 7B. As a result, theanisotropic magnetic field Hk in the Y direction, which is thesensitivity-axis direction (P direction) of the magnetic detectors 11,12, 13, and 14, is larger in the shield layer 3 illustrated in FIG. 7Athan in the shield layer 103 illustrated in FIG. 7B, and the saturatedmagnetization in the Y direction of the shield layer 3 according to theembodiment is larger than the saturated magnetization in the Y directionof the shield layer 103 according to the comparative example. As aresult, in the current detection device 1 according to the embodiment ofthe present invention, the use of the height adjustment layers 36 and 37enables a shield effect in the Y direction of the shield layer 3 to beincreased and enables the dynamic range for detecting the current I0 tobe measured to be widened.

As illustrated in the circuit diagram in FIG. 8, the magnetic detectors11, 12, 13, and 14 constitute a bridge circuit, and the midpoint voltageV1 obtained from the wiring path 8 and the midpoint voltage V2 obtainedfrom the wiring path 7 are applied to a coil energization section 15.The coil energization section 15 includes a differential amplifier 15 aand a compensation circuit 15 b. The differential amplifier 15 a mainlyincludes an operational amplifier and obtains, as a detected voltage Vd,a difference between the midpoint voltages V1 and V2 (V1−V2) inputthereto. The detected voltage Vd is applied to the compensation circuit15 b, which generates a compensation current Id. The compensationcurrent Id is applied to the feedback coil 30.

An integrated unit made up of the differential amplifier 15 a and thecompensation circuit 15 b may be referred to as a compensation-typedifferential amplifier.

As illustrated in FIG. 8, the land portion 31 of the feedback coil 30 isconnected to the compensation circuit 15 b, and the land portion 32 isconnected to a current detector 17. The current detector 17 includes aresistor 17 a connected to the feedback coil 30 and a voltage detector17 b that detects a voltage affecting the resistor 17 a.

Next, the operation of the current detection device 1 will be described.

As illustrated in FIG. 8, a current magnetic field H0 for measurement isinduced by the current I0 that is to be measured and that flows in the Xdirection through the current path 40. The current magnetic field H0 isapplied to the magnetic detectors 11, 12, 13, and 14. The currentmagnetic field H0 causes the resistance values of the magnetic detectors11 and 14 to increase and causes the resistance values of the magneticdetectors 12 and 13 to decrease. Thus, the detected voltage Vd, which isan output value of the differential amplifier 15 a, increases as thecurrent I0 to be measured increases.

The compensation current Id is applied from the compensation circuit 15b to the feedback coil 30, and accordingly a cancelling current Id1flows through the feedback coil 30. In the counter detector 30 a, thecurrent I0 to be measured and the cancelling current Id1 flow indirections opposite to each other, and thus the cancelling current Id1causes a cancelling magnetic field Hd that cancels the current magneticfield H0 to affect the magnetic detectors 11, 12, 13, and 14.

If the current magnetic field H0 induced by the current I0 to bemeasured is larger than the cancelling magnetic field Hd, the midpointvoltage V1 obtained from the wiring path 8 is high, the midpoint voltageV2 obtained from the wiring path 7 is low, and the detected voltage Vdas an output of the differential amplifier 15 a is high. At this time,the compensation circuit 15 b generates the compensation current Id forincreasing the cancelling magnetic field Hd and making the detectedvoltage Vd close to zero, and the compensation current Id is applied tothe feedback coil 30. When the cancelling magnetic field Hd that affectsthe magnetic detectors 11, 12, 13, and 14 and the current magnetic fieldH0 are balanced and when the detected voltage Vd is lower than or equalto a predetermined value, the current flowing through the feedback coil30 is detected by the current detector 17 illustrated in FIG. 8. Thedetected current is regarded as a measured value of the current I0.

In the current detection device 1, the shield layer 3 is disposedbetween the current path 40 and the magnetic detectors 11, 12, 13, and14, and the current magnetic field H0 for measurement induced by thecurrent I0 to be measured is absorbed. Thus, the current magnetic fieldH0 to be applied to the magnetic detectors 11, 12, 13, and 14 isattenuated. As a result, the range of change in the current I0 until themagnetoresistive elements of the magnetic detectors 11, 12, 13, and 14are magnetically saturated can be widened, and the dynamic range can bewidened.

Furthermore, with use of the height adjustment layers 36 and 37,deformation of the shield layer 3 can be prevented, the anisotropicmagnetic field Hk can be increased, and saturated magnetization can beenhanced. Accordingly, the shield effect of the shield layer 3 can beincreased and the dynamic range can be further widened.

As illustrated in FIG. 5, the shield layer 3 according to the embodimentis flat and has no change in height, in the Y direction which is thesensitivity-axis direction, that is, in the direction in which thecurrent magnetic field H0 acts. Thus, a magnetic absorption effect ofthe shield layer 3 is proportional to change in the intensity of thecurrent magnetic field H0, and the linearity of the detection output ofthe current detection device 1 can be increased. In contrast, the shieldlayer 103 according to the comparative example illustrated in FIG. 6includes a bent portion of a magnetic path, the bent portion beingproduced due to the stepped portions 9 c. As a result, theproportionality of the magnetic absorption effect of the shield layer 3with respect to change in the intensity of the current magnetic field H0decreases, and the linearity of the detection output of the currentdetection device 1 deceases.

EXAMPLES

The anisotropic magnetic field Hk in the Y direction was measured byusing the shield layers 3 and 103 illustrated in FIGS. 7A and 7B,respectively.

The shield layers 3 and 103 are plated layers made of Ni—Fe alloy. Thealloy composition is 80% by mass of Ni and 20% by mass of Fe. The shieldlayers 3 and 103 both have a thickness t of 16.5 μm. The shield layer 3according to the embodiment of the present invention illustrated in FIG.7A includes side portions 3 a extending in the longitudinal direction (Xdirection) and end portions 3 b extending in the lateral direction (Ydirection). The width Ws in the lateral direction (Y direction) is 0.14mm, and the length Ls in the longitudinal direction (X direction) is0.81 mm. In the shield layer 103 according to the comparative exampleillustrated in FIG. 7B, a width Wc in the lateral direction is 0.14 mm,and a length Lc in the longitudinal direction is 0.81 mm. The shieldlayer 103 according to the comparative example includes, at both sideportions thereof, deformed portions resulting from stepped portions. Thedeformed portions each have a step height Fh of 5.0 μm and a width fw of12 μm.

The anisotropic magnetic field Hk was actually measured for the shieldlayers 3 and 103. FIG. 9 illustrates a relationship between an externalmagnetic field (H) and magnetization (M) in the shield layer. Thehorizontal axis represents the intensity of the external magnetic fieldthat affects in the sensitivity-axis direction (Y direction), and thevertical axis represents the magnitude of magnetization in the shieldlayer. The anisotropic magnetic field Hk is the intensity of theexternal magnetic field (H) until the magnetization of the shield layeris saturated.

The measured value of the anisotropic magnetic field Hk was 97.5 in theshield layer 3 according to the embodiment of the present inventionillustrated in FIG. 7A, and the measured value of the anisotropicmagnetic field Hk was 76.4 in the shield layer 103 according to thecomparative example illustrated in FIG. 7B. In the current detectiondevice 1 according to the embodiment of the present invention, theshield layer 3 illustrated in FIG. 7A is capable of obtaining a largeanisotropic magnetic field compared to the shield layer 103, and thuscapable of increasing saturated magnetization. Accordingly, the dynamicrange of measurement of a current value can be widened.

FIG. 11A illustrates data about the linearity of a detection output ofthe current detection device 1 according to the embodiment of thepresent invention including the shield layer 3 illustrated in FIG. 7A,and FIG. 11B illustrates data about the linearity of a detection outputof a current detection device including, instead of the shield layer 3,the shield layer 103 according to the comparative example illustrated inFIG. 7B.

FIG. 10 schematically illustrates a relationship between a full scale(FS) and linearity of a detection output of an external magnetic field H(current magnetic field H0) applied to the current detection device 1 inthe sensitivity-axis direction. In FIG. 10, the straight broken linerepresents an ideal change in the external magnetic field H and adetection output, and the solid line represents an actually measureddetection output of the current detection device 1. The linearity isobtained by calculating a maximum value Amax of an output differencebetween the detection output (solid line) and the straight line (brokenline), and calculating (Amax/FS)×100%.

A plurality of (N=1000) current detection devices 1 were manufactured,each being the current detection device 1 according to the embodimentincluding the shield layer 3 illustrated in FIG. 7A, and the linearity(%) of a detection output was actually measured for each currentdetection device 1. Also, the same number of (N=1000) current detectiondevices, each including the shield layer 103 illustrated in FIG. 7Binstead of the shield layer 3, were manufactured, and the linearity (%)of a detection output was actually measured for each current detectiondevice.

In FIGS. 11A and 11B, the horizontal axis represents the ranges oflinearity (%) as a measured value, each range having a width of 0.01%,and the vertical axis represents the frequency (%) of a measured valuein each range having a width of 0.01%. As illustrated in FIG. 11A, thecurrent detection devices 1 according to the embodiment of the presentinvention including the shield layer 3 are capable of suppressing thelinearity of a detection output to 0.1% or less. In contrast, asillustrated in FIG. 11B, the linearity is more than 0.1% in some currentdetection devices including the shield layer 103.

FIGS. 12A and 12B respectively illustrate a shield layer 3A according toExample 1 and a shield layer 3B according to Example 2, which are usedin the current detection device 1 according to the embodiment of thepresent invention.

The shield layer 3B according to Example 2 illustrated in FIG. 12B isthe same as the shield layer illustrated in FIG. 7A and has a thicknesst of 16.5 μm, a width Ws in the lateral direction (Y direction) of 0.14mm, and a length Ls in the longitudinal direction (X direction) of 0.81mm. The shield layer 3A according to Example 1 illustrated in FIG. 12Ahas a thickness t of 16.5 μm, a width Ws in the lateral direction (Ydirection) of 0.14 mm, and a length Ls in the longitudinal direction (Xdirection) of 0.66 mm. The shield layer 3A according to Example 1 andthe shield layer 3B according to Example 2 have the same thickness t andthe same width Ws in the lateral direction (Y direction), but the shieldlayer 3A according to Example 1 has a smaller length Ls in thelongitudinal direction (X direction) than the shield layer 3B accordingto Example 2.

In the shield layers 3A and 3B illustrated in FIGS. 12A and 12B, aconvex curve portion (arc portion) R was formed at the end portions 3 boriented in the longitudinal direction (X direction) and a relationshipbetween change in the size of R and the anisotropic magnetic field Hkwas examined The broken line in FIG. 13 represents a relationshipbetween the size of R formed at the end portions 3 b of the shield layer3B according to Example 2 illustrated in FIG. 12B and change in theanisotropic magnetic field Hk (mT) in the sensitivity-axis direction (Ydirection). The solid line in FIG. 13 represents a relationship betweenthe size of R formed at the end portions 3 b of the shield layer 3Aaccording to Example 1 illustrated in FIG. 12A and change in theanisotropic magnetic field Hk (mT) in the sensitivity-axis direction (Ydirection).

In FIG. 13, the horizontal axis represents the size of the arc portion Rformed at the end portions 3 b of each of the shield layers 3A and 3B.In each of the shield layer 3A and shield layer 3B illustrated in FIGS.12A and 12B, the size of the arc portion R was changed in order: R=5 μm,20 μm, 50 μm, and 70 μm (0.07 mm). The vertical axis in FIG. 13represents the magnitude of the anisotropic magnetic field Hk (mT).

As represented by a broken line in FIG. 12A and a solid line in FIG.12B, the arc portion R=5 μm, 20 μm, and 50 μm is formed at each of fourcorner portions where the side portions 3 a and the end portions 3 bcross each other in the individual shield layers 3A and 3B. In a casewhere R=70 μm (0.07 mm), as represented by a solid line in FIG. 12A, thearc portion extends over the entire length in the lateral direction (Ydirection) at the end portions 3 b, and a semicircular shape is formedsuch that the end portions 3 b protrude in the longitudinal direction (Xdirection). Also in the shield layer 3B illustrated in FIG. 12B, whenR=70 μm (0.07 mm), a semicircular shape is formed such that the endportions 3 b protrude in the longitudinal direction (X direction).

As represented by the broken line in FIG. 13, in the shield layer 3Baccording to Example 2 in which the length Ls in the longitudinaldirection (X direction) is 0.81 mm, a large difference is not seen inthe anisotropic magnetic field Hk even if the size of R is sequentiallyincreased from 5 μm to 70 μm. In contrast, as represented by the solidline in FIG. 13, in the shield layer 3A according to Example 1 in whichthe length Ls in the longitudinal direction (X direction) is 0.66 mm,the anisotropic magnetic field Hk can be significantly increased byincreasing R. In the shield layer 3A according to Example 1, when R=70μm and when the end portions 3 b have a protruding curve over the entirelength to form a semicircular shape, the anisotropic magnetic field Hkcan be increased to be equivalent to that of the shield layer 3Baccording to Example 2. Accordingly, the saturated magnetic field can beincreased.

An estimated reason the anisotropic magnetic field Hk increases as Rincreases is that, when R increases, a region not parallel to thesensitivity-axis direction (Y direction) extends in the X direction atthe end portions 3 b of the shield layer 3 and the magnetic anisotropyat the end portions 3 b increases. An estimated reason the anisotropicmagnetic field Hk is larger in the shield layer 3A according to Example1 than in the shield layer 3B according to Example 2 even if the arcportions R at the end portions 3 b have the same size is that the shapeof the end portions 3 b contributes more to the magnetic anisotropy asthe ratio Ls/Ws between the length Ls and the width Ws in the shieldlayer decreases.

As can be understood from FIGS. 12A and 12B, if the length Ls is smallerthan or equal to 0.7 mm in a case where the width Ws is 0.14 mm, aneffect obtained by forming the end portions 3 b having a protrudingcurve increases. Thus, the aspect ratio of Ls/Ws is preferably 0.7/0.14or less, that is, Ls/Ws is preferably 5 or less. Furthermore, it ispreferable that the end portions 3 b have a protruding curve over theentire length in the lateral direction, and it is most preferable thatthe end portions 3 b have a semicircular shape. In this way, as a resultof forming a protruding curve portion at the end portions 3 b, asaturated magnetic field can be increased even if the area of the shieldlayer 3 is small. Accordingly, decreasing the size of the currentdetection device can be promoted.

What is claimed is:
 1. A current detection device comprising: a currentpath through which a current to be measured flows; a coil layer having aplaner helical pattern; a magnetic detector facing the coil layer; ashield layer disposed between the current path and the coil layer; acoil energization section configured to control a current to be appliedto the coil layer in accordance with an increase or decrease in adetection output of the magnetic detector; and a current detectorconfigured to detect an amount of current flowing in the coil layer,wherein the coil layer, a height adjustment layer, and an upperinsulating layer are disposed on a lower insulating layer that coversthe magnetic detector, the coil layer including a plurality of segmentsarranged in the helical pattern, the height adjustment layer being madeof a nonmagnetic metal and being disposed on both sides of the coillayer including the plurality of segments, and the upper insulatinglayer being made of an inorganic material and covering the coil layerand the height adjustment layer, and the shield layer, which is disposedon the upper insulating layer, covers both the coil layer including theplurality of segments and the height adjustment layer, and both sideportions of the shield layer are located above the height adjustmentlayer.
 2. The current detection device according to claim 1, wherein thecoil layer and the height adjustment layer have an identical height. 3.The current detection device according to claim 1, wherein the coillayer and the height adjustment layer are plated layers.
 4. The currentdetection device according to claim 3, wherein the coil layer and theheight adjustment layer are made of an identical conductive metallicmaterial.
 5. The current detection device according to claim 1, whereinthe height adjustment layer has a length in a direction in which thecurrent flows in the coil layer, the length being larger than a lengthin the direction of the shield layer.
 6. The current detection deviceaccording to claim 1, wherein the height adjustment layer has a width ina crossing direction that crosses a direction in which the current flowsin the coil layer, the width being larger than a width in the crossingdirection of each of the plurality of segments included in the coillayer.
 7. The current detection device according to claim 1, wherein theshield layer includes the side portions extending in a longitudinaldirection of the shield layer and located above the height adjustmentlayer, and end portions extending in a lateral direction of the shieldlayer and crossing the current flowing in the coil layer, and the shieldlayer has a larger dimension in the longitudinal direction than in thelateral direction, and the end portions have a curve shape protruding inthe longitudinal direction over an entire length in the lateraldirection when viewed in plan.
 8. The current detection device accordingto claim 7, wherein the end portions have a substantially semicircularshape when viewed in plan.
 9. The current detection device according toclaim 7, wherein a sensitivity-axis direction of the magnetic detectorcorresponds to the lateral direction.